2016-07-08
×÷Õߣº£º£ºÃÀ²Ê¹ú¼Ê
¡¡¡¡½üÈÕ£¬ÃÀ²Ê¹ú¼ÊÌ«ÑôÄÜ(³É¶¼)ÓÐÏÞ¹«Ë¾°²È«¼à¶½Ð¡×é³ÉÁ¢´ó»áôß°²È«Æô¶¯»áÒéÂ¡ÖØÕÙ¿ª£¬±¾´Î»áÒéÉóÒ鲢ͨ¹ýÁË¡¶ÃÀ²Ê¹ú¼ÊÌ«ÑôÄÜ(³É¶¼)ÓÐÏÞ¹«Ë¾°²È«¶½²ìС×éÕ³Ì(ÊÔÐÐ)¡·£¬ÃÀ²Ê¹ú¼ÊÌ«ÑôÄÜ(ÔÀÑô¡¢¡¢³É¶¼)ÓÐÏÞ¹«Ë¾¶Ê³¤Ð»Òã³öϯ»áÒé²¢×÷ÖØÒªÅúʾ¡£¡£
¡¡¡¡³ÉÁ¢ÃÀ²Ê¹ú¼ÊÌ«ÑôÄÜ(³É¶¼)ÓÐÏÞ¹«Ë¾°²È«¶½²ìС×飬ּÔÚÌá¸ßÔ±¹¤µÄ°²È«ËØÑøºÍ×°Öõݲȫ»úÄÜ£¬È«ÃæÌáÉý¹«Ë¾°²È«ÖÎÀíˮƽ¡£¡£Ð¡×éÓÉÃÀ²Ê¹ú¼ÊÌ«ÑôÄÜ(ÔÀÑô¡¢¡¢³É¶¼)ÓÐÏÞ¹«Ë¾¸ß¹ÜÍŶӷÖÈμලС×é×鳤¡¢¡¢¸±×鳤£¬³§Îñ²¿²¿³¤ÕÂÎÄÏé¡¢¡¢EHS¸±¾ÀíÏòÇ컪ΪִÐÐС×鸱×鳤£¬²¢¶Ô°²È«¶½²ìС×éºÍÖ´ÐÐС×éµÄ¹¤×÷¹¤×÷×÷ÁËÃ÷È·»®¶¨£¬¶Ô¸÷²¿ÃÅÕÆ¹ÜÈ˵ÄÖ°ÔðÌá³ö¾ßÌåÒªÇ󡣡£
¡¡¡¡»áÉÏ£¬Ð»¶Ê³¤¾ÍÈ«ÃæÂäʵÔÀÑô¡¢¡¢³É¶¼Á½µØ°²È«³ö²ú¹¤×÷ÔÙÌáÐÂÒªÇ󣺣º£ºÒ»Êǰ²È«ÎÊÌâ²»ÈÝСêֵµÃÿλԱ¹¤µÄÆ÷ÖØ£¬°²È«ºìÏßÒ»µ©´¥Åö£¬Ò»ÂÉ´ÓÑÏ£»£»¶þÊǰ²È«ÎÊÌâÊdzö²ú¾ÓªµÄǰÌáºÍ»ù´¡£¡£¬Èκΰ²È«ÎÊÌâ¿Ï¶¨ÒªµÚÒ»¹¦·òÉϱ¨£¬µÚ¶þλ²ÅÊǹ¤ÆÚºÍ¸÷ÏîÖ¸±ê£»£»ÈýÊÇÒª×öµ½ÔÀÑô¡¢¡¢³É¶¼Á½µØ¹«Ë¾°²È«ÖƶÈͳһ»¯¡£¡£³É¶¼Á½µØÒªÈ·±£ÐÅÏ¢»¥Í¨£¬ÔÚ´Ë»ù´¡ÉÏÏ໥ÓÅ»¯¡¢¡¢Ï໥²é©²¹È±¡£¡£
¡¡¡¡Ð»¶Ê³¤Ç¿µ÷£¬Ä¿Ç°³É¶¼¹«Ë¾½øÈëÁ˽¨ÉèµÄ³å´Ì½×¶Î£¬Óйز¿ÃÅÒª×öºÃ½¨ÉèÆÚ¡¢¡¢ÔËÓªÆÚ¸÷ÀàΣÏÕÔ´¼ø±ð£¬Ëû°µÊ¾£¬°²È«Ó¦ÒýÆðÿ¸öÐÔÃüµÄÆ÷ÖØ£¬±ØÒªÔÀÑô¡¢¡¢³É¶¼Á½µØÔ±¹¤Í¬ÐIJ¢Á¦¡¢¡¢Æë×¥¹²¹Ü¡£¡£

¡¡¡¡ÃÀ²Ê¹ú¼ÊÌ«ÑôÄÜ(³É¶¼)ÓÐÏÞ¹«Ë¾Ãð»ðʵ²ÙÑÝÁ·
¡¡¡¡³ýÁËÕÙ¿ª°²Î¯»á»áÒ飬Ðû¹á°²È«Ô»Ö÷Ì⣬³§Îñ²¿»¹³ö¸ñ×éÖ¯ÁËµç³ØÒ»³§¡¢¡¢µç³Ø¶þ³§¡¢¡¢×é¼þ³§½øÐÐÓ¦¼±·ÖÉ¢ÑÝÁ·¡¢¡¢°²È«ÖªÊ¶½ÏÁ¿¡¢¡¢°²È«²ÂÃÕÒÔ¼°°²È«Õ÷ÎÄ¡¢¡¢È«Ô±²éÒþ»¼µÈ»î¶¯¡£¡£ÃÀ²Ê¹ú¼ÊÌ«ÑôÄÜ(³É¶¼)ÓÐÏÞ¹«Ë¾½áºÏ¹«Ë¾ÏîĿʩ¹¤½øÕ¹Çé¿ö£¬Óɹ«Ë¾×éÖ¯£¬½áºÏÏîĿʩ¹¤µÄÖØÒªµ¥Ôª·¢Õ¹ÁËÕë¶Ô»ð¾¯¡¢¡¢Óж¾Óк¦ÆøÌåй©¡¢¡¢µØÕðµÈÇé¾°µÄÓ¦¼±ÌÓÉú·ÖÉ¢ÑÝÁ·ÒÔ¼°Ãð»ðʵ²ÙÑÝÁ·¡£¡£

¡¡¡¡ÃÀ²Ê¹ú¼ÊÌ«ÑôÄÜ(ÔÀÑô¡¢¡¢³É¶¼)ÓÐÏÞ¹«Ë¾Ê×ϯ²ÆÕþ¹ÙÖܵ¤Îª°²È«ÖªÊ¶½ÏÁ¿Ò»µÈ½±»ñ½±ÐÐÁа佱
¡¡¡¡½üÄêÀ´£¬ÎÒ¹ú¹â·üÆóÒµ²úÉú»ð¾¯µÈÖØ´ó°²È«±äÂҵݸÀý²ã³ö²»Ç¼ÓÇ¿°²È«³ö²úÒÑ»ðÉÕüë¡£¡£Õë¶Ôµç³Ø³ö²ú³µ¼äÖÆÈÞÓë¿ÌÊ´¹¤ÐòËùʹÓõÄËáÐÔÒ©Òº£¬À©É¢¹¤ÐòµÄÁ×Ô´(ÈýÂÈÑõÁ×£¬¾ç¶¾»¯Ñ§Æ·)ÊÇ·ñÓÐй©£¬PECVD¹¤Ðò¸ü»»Ê¯Ó¢¹Ü£¬Ë¿Íø¹¤Ðò²ÁÊÃÍø°åµÈһϵÁÐµç³ØÆ¬ÖÆ×÷¹¤ÐòµÄ°²È«Òþ»¼£¬ÃÀ²Ê¹ú¼ÊÌ«ÑôÄÜÔÀÑô¡¢¡¢³É¶¼Á½µØ¹«Ë¾ÕýÇÐʵÂäʵ°²È«³ö²úÖ÷ÌåÔðÈμ°°²È«³ö²ú¸÷Ïî·À±¸´ëÊ©¡£¡£¿ÌÒ⽫ÿһ¸ö°²È«Òþ»¼¡¢¡¢Ã¿Ò»¸ö±äÂÒÃçÍ·¶ôÖÆÔÚÃÈÑ¿½×¶Î£¬¹²Í¬ÖúÁ¦¹â·üÐÐÒµµÄ½¡¿µ¼±¾ç·¢Õ¹¡£¡£
